Used ADE / KLA / TENCOR MicRhoSense 6035 #9301390 for sale

ID: 9301390
Slice resistivity gage.
ADE / KLA / TENCOR MicRhoSense 6035 is a powerful wafer testing and metrology equipment designed to enable process control in the semiconductor manufacturing industry. The system enables rapid detection and analysis of defects on wafers, while providing fine-grain analysis of feature sizes on process layers whether during deposition or later in the manufacturing process. The unit consists of a specialized automated optical microscope (AOM) which provides image capture and manual measurements with up to 10x-100x zoom capabilities and a variety of filters for different layers. An advanced auto-focus machine is capable of focusing on layers within 1um of the surface and the tool can handle wafer sizes ranging from 1'', 2'', 3'', to 12''. The user interface of the asset is highly intuitive and easy to use. The software provides an easy setup for automated measurements such as feature size, defect density, overlay and CD across multiple die or layers as well as defect classification by type. The programmable nature of the software also allows for custom trace data collection and analysis, defect impedance corrections and advanced algorithming. The model also features a Defect Review Station, which allows for more detailed analysis of defects using 3D contours and overlay measurements. Additionally, SmartRing analysis can be used to compare process practices, troubleshoot results and take corrective actions. In summary, ADE MicRhoSense 6035 provides a powerful platform for wafer testing and metrology. The advanced auto-focus, defect classification and trace data analysis capabilities enable quick and accurate defect detection and process layer review. With its intuitive user interface and powerful defect review capabilities, the equipment ensures efficient and precise process control.
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