Used ADE / KLA / TENCOR Microsense 6033T #9301384 for sale
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ADE / KLA / TENCOR Microsense 6033T is a wafer testing and metrology equipment used for semiconductor fabrication processes. It is a highly precise, automated system capable of measuring fine line widths and wafer defects with nanometer resolution. ADE Microsense 6033T is an integrated metrology platform composed of several components. It features a state-of-the-art advanced Hexa-LEXSR white light interferometer, a fully automated wafer mapper and prober, and an enhanced 3D angled-viewer. It utilizes precision robotic motion control, submicron encoders, and a low-noise stereo zoom microscope. This combination of features allows for the efficient detection and analysis of isolated and parametric defects on the microscopic level. The unit runs on a Intel rack-mount processor controlling the automated wafer mapper and prober. It is equipped with a programmable logic controller (PLC) in-circuit tester, and a precision DC servo motor for precise motor control. To correctly measure the wafer, the machine uses the Hexa-LEXSR interferometer and the 3D angled viewer as its optical sensors. The black and white light interferometer allows for precise, low-noise measurements, while the 3D angled viewer can reveal hidden defects in the various layers of the wafer and enable the capture of parametric defects. To analyze wafer defects, KLA Microsense 6033T utilizes five different algorithms: a focus algorithm which locates surface defects; four image processing algorithms to detect defects; and an edge-detection algorithm for analyzing fine grain defects. The series of on-board data acquisition boards enable the tool to accumulate a large amount of information with great speed and accuracy, as well as pinpoint the locations of defects. Microsense 6033T is a powerful device widely used for measuring wafer defects. With its multi-faceted design and high precision tools, this asset is able to provide accurate and reliable wafer analysis and maximize process productivity and yield accuracy for the semiconductor industry.
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