Used ADE / KLA / TENCOR Ultragage 9500 #9211013 for sale
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ID: 9211013
Wafer Size: 4"-8"
Wafer measurement system, 4"-8"
Single elevator
2D Contour map
ASC2000 Controller
Thickness centerpoint
Five point and full wafer scan
3 Point / Best fit reference: Bow and warp shape
500nm Design rule: Multifunctional dimensional measurements
GAST Vacuum pump
Data points: 8700 / 60 Seconds.
ADE / KLA / TENCOR Ultragage 9500 is a high-end wafer testing and metrology system designed to ensure quality control of critical components in microelectronics. It caters to the demanding microelectronics industry by providing precise measurements of any number of different parameters. The 9500 is highly suited to automated processes and offers industry leading speed and efficiency in strip and wafer critical parameters. The built-in metrology stations measure a number of different features from wafer backside characterization, transducer DC and AC parameters, platen height, and uplift force. The 9500 offers 3D layer profilometry, providing accurate information on the quality of a wafer's surfaces. Its high-resolution processes can detect surface defects and damage as small as 1um. Its unique 3D layer recognition algorithm produces accurate measurements, which can be saved and compared to different wafers. This 9500 model also boasts double light source calibration, layer scanning rates up to 75mm per second, and a home page customizable for up to 30 user-defined settings. Its advanced metrology capabilities predict different behavior based on materials used, which helps reduce costs and testing time. The 9500 is also renowned for its quick processing and analysis times. Advanced post-processing features can quickly generate results with several levels of analysis, eliminating the need to run additional tests. In addition, the user friendly graphical user interface (GUI) offers various preset configurations to customize the testing. This 9500 model-specific GUI provides helpful real-time feedback, as well as all standard statistics parameters to provide maximum control over the testing process. ADE Ultragage 9500 offers the best in precision metrology, with a wide range of parameters to ensure critical quality control of wafers. With its comprehensive metrology tools, statics, post-process features, quick processing solution, and customizable GUIs, KLA Ultragage 9500 is an outstanding system for testing and quality control of microelectronics.
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