Used ADE / KLA / TENCOR UltraGage 9520 #9245050 for sale
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ID: 9245050
Dimensional measurement system
ASC200 Controller included
Thickness: ± 1.00µ
Shape (Bow / Warp):
±( 3.00 + 5% of reading) µm
±( 4.00 + 5% of reading) µm
Global flatness: ± 0.50 µm
Integral wafer centering and pre-aligner
Backside contacting chuck
Vacuum chuck diameters:
Small (23.3 mm): 3", 100 mm -150 mm wafers
Large (33.4 mm): 125 mm- 200 mm wafers
Wafer contact materials:
Resting pads: Santoprene
Vacuum chuck: Polyurethane
Nominal wafer thickness range: 250 µm - 750 µm
Auto-loader:
Single / Dual cassette
Sorting: Slot-to-slot / Cassette-to-cassette
Backside contact, horizontal cassette orientation
Wafer contact material: Teflon
Nominal wafer thickness range: 250 µm - 750 µm
Conductivity type: P / N
Edge exclusion:
Thickness: 3 mm / 5 mm
Shape: 3 mm
Nominal wafer thickness: 250 µm - 750 µm
Resistivity: > 0.1-200 Ω cm
Edge gradient: 0.1 µm/mm
Power supply:
Temperature range: 12.7°- 29.4° C (55° - 85° F)
Relative humidity: 55 to 95% non-condensing
Vacuum: 0.6 SCFM, 635 mm (25") Hg ± 10%
Peak usage: 2.8 kVA
Voltage: 100/120/200/208/220/230/240 VAC ± 10%
50/60 Hz, Single phase.
ADE / KLA / TENCOR UltraGage 9520 is a highly sophisticated wafer testing and metrology equipment that sets the industry benchmark for advanced automated metrology solutions. This cutting-edge system combines precision technology, innovative design features, and robust software capabilities to deliver unparalleled accuracy, repeatability, and efficiency in semiconductor manufacturing processes. At the core of ADE UltraGage 9520 is its advanced measurement technology, which leverages proprietary algorithms and sensor systems to achieve sub-nanometer resolution and exceptional precision in critical wafer measurement tasks. The unit is equipped with a high-resolution optical inspection machine, laser displacement sensors, capacitance sensors, and other state-of-the-art sensors to accurately capture wafer topography, thickness, film uniformity, and defect detection data with unmatched accuracy and reliability. One of the key features that sets KLA 9520 UltraGage apart is its versatile and modular design, which allows for seamless integration into existing wafer production lines and adaptable customization to suit specific manufacturing requirements. The tool offers a range of wafer handling configurations, including single-wafer and batch-processing modes, as well as compatibility with various wafer sizes, materials, and process technologies, making it a versatile solution for both R&D and high-volume production environments. UltraGage 9520's intuitive user interface and powerful software platform provide users with advanced data analysis tools, visualization capabilities, and real-time monitoring features to streamline the inspection and metrology workflow. The asset can generate comprehensive wafer maps, 3D topography images, and statistical analysis reports to facilitate process optimization, defect root cause analysis, and quality control initiatives in semiconductor fabrication. In addition to its advanced measurement capabilities, 9520 UltraGage is engineered for high throughput and operational efficiency, with fast data acquisition rates, rapid wafer loading and unloading, and automated measurement routines to minimize downtime and maximize productivity in a production environment. The model is designed to meet the stringent requirements of modern semiconductor manufacturing, offering robust performance, reliability, and ease of maintenance to ensure sustained operational excellence and long-term value for customers. Overall, TENCOR UltraGage 9520 represents a state-of-the-art solution for wafer testing and metrology needs in the semiconductor industry, combining precision measurement technology, versatile design features, and powerful software capabilities to enable superior process control, yield optimization, and quality assurance in advanced semiconductor manufacturing processes. With its exceptional accuracy, reliability, and efficiency, KLA UltraGage 9520 is a trusted tool for semiconductor manufacturers seeking to achieve the highest standards of quality, performance, and innovation in wafer production.
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