Used ADE / KLA / TENCOR UltraScan 9300 #9241348 for sale
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ID: 9241348
Wafer inspection system
E+ Station
Pre-aligner station
(2) Send cassettes
Single end effector robot
ASC System controller
Options:
(3) Receive cassettes
Dual high / Low res station
Light curtain
Dual end effector robot
Wafer typing
ASC 2000 System controller.
ADE / KLA / TENCOR UltraScan 9300 equipment is a powerful and versatile solution for wafer testing and metrology. It enables manufacturers to track defect conditions in their wafers more effectively, allowing for improved process control and yield management in semiconductor fabrication. The system offers high-speed wafer scanning and analysis in both 2D and 3D formats, at resolutions up to 1.35µm. It's equipped with 10x and 4x optical microscopes, both with advanced image processing capabilities. An automatic microscope stage controller allows for accurate positioning with X-Y, Z-axis motion and a built-in calibration profile. Along with precision wafer mapping, ADE UltraScan 9300 also offers automated defect detection, allowing for faster, more accurate defect analysis. The unit's optics are tuned to optimize image acquisition in various conditions. Its high power laser and sensors have the capability to measure both forward and reflected light transmission, making it well-suited for wafer thickness measurements and isolated particle analysis. The machine can also monitor critical parameters such as Contact Resistance, Reflow Solder Coverage, Surface Roughness, and Dielectric Layer Thickness. Its intuitive software interface provides a powerful set of features for wafer testing and metrology. These include 3D and multi-slice imaging, powerful image segmentation filters, automated result processing, and a suite of post-process calibration tools for accurate measurement and defect analysis. The software also features customized export options for data, images, and reports. KLA ULTRA SCAN 9300 is easy to install and maintain, and is designed to minimize downtime. Its robust design is certified for cleanroom operation and is built to withstand environmental conditions including vibration and shock. Overall, ADE / KLA / TENCOR ULTRA SCAN 9300 is a reliable, high-speed, high-precision wafer testing and metrology tool engineered to provide reliable and repeatable results. With its suite of automated, intuitive tools and features, it can help improve process control and yield management in semiconductor fabrication.
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