Used ADE / KLA / TENCOR UltraScan 9300 #9281937 for sale

ADE / KLA / TENCOR UltraScan 9300 Wafer Testing and Metrology Equipment is a high-performance, non-contact, multi-die metrology instrument designed for advanced semiconductor development, yielding unparalleled performance and accuracy. The instrument's patented architecture enables the automated capture of ultra-high-resolution images of up to 9300 contiguous dies on a wafer in a matter of minutes and from multiple perspectives. The imaging system uses an array of LEDs to actively illuminate the wafer surface from four angles. This illumination ensures that all features of the die are visible and enhances the contrast of the structures. The combination of this illumination and proprietary optics allow for images to be formed with an effective resolution of 0.63μm per pixel. Once collected, the raw image data is processed using an integrated suite of advanced algorithms to measure various parameters such as die locations, size and shape, electrical properties, device-level yield and defectivity. The accuracy of measurements is ensured through statistical processing of repeat images and advanced non-destructive testing capabilities that enable function-oriented metrology. The unit also incorporates an integrated analysis environment for review of results and effective visualization of data. In addition to the imaging and process analysis, ADE UltraScan 9300 includes high-level data management tools to assist in coordinating and archiving measurement results. The machine can be programmed for automatic measurement execution and can interface with several laboratory automation systems. This capability allows for data collection to be done at any frequency from a single wafer to full reticle. KLA ULTRA SCAN 9300 provides an exciting combination of imaging, analysis and result management capabilities, making it the ideal tool for industrial and research wafer testing and metrology. The large area coverage and extremely high resolution capabilities ensure that all of the features on the wafer can be accurately characterized. With its high-level data management functionality, TENCOR UltraScan 9300 enables measurements to be effectively stored and retrieved over long periods of time, making it an invaluable research tool.