Used ADE / KLA / TENCOR UltraScan 9600 #9105659 for sale
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ID: 9105659
Wafer inspection system
E+ Station
Pre-aligner station
(2) Send cassettes
(3) Receive cassettes
Hi res station
Lo res station
Dual end effector robot
Wafer typing option
ASC 2000 System controller.
ADE / KLA / TENCOR UltraScan 9600 is a high-precision wafer testing and metrology equipment. It is designed to meet the rigorous demands of the semiconductor industry and its high-volume production requirements. The system features a reliable, repeatable, and accurate non-conformance inspection solution, allowing users to quickly identify defects on wafers with minimal manual effort. The unit's high-speed wafer image scanning and metrology technology facilitates fast, reliable wafer inspection with the ability to scan up to 600 wafers per hour. It features an integrated vision subsystem with a full-color, high-resolution matrix area array camera with a 3um resolution to capture images of even the smallest defects on wafers. This quality image scanning capability is combined with a light source that has nearly 100 μm resolution to ensure precise defect location and analysis. ADE UltraScan 9600 also features a patent-pending defect detection and classification algorithm that allows for real-time, automated detection of defects while automatically classifying the type of defect. This eliminates the need for manual inspection and subsequent review of the data. The machine is designed to meet the most demanding production requirements with its robust, fast, reliable, and efficient scanning and metrology technology. It allows users to quickly identify defects on wafers in a fraction of the time it would take to do so manually, reducing cost and time. The tool also features ATE compatibility, allowing for quick loading and unloading of wafers from ATE systems for efficient production line operation. In addition, KLA ULTRA SCAN 9600 also features extensive safety protocols, ensuring that users maintain a safe work environment. From its easy-to-navigate user interface, alarmed monitoring asset and remote access capabilities to its patented beam safety model, the equipment ensures that users are able to safely use the system without compromising safety. TENCOR UltraScan 9600 is a powerful, high-precision wafer testing and metrology unit designed to meet the most demanding production needs. Its advanced scanning and metrology technology ensures high-accuracy, fast, and reliable results, while its integrated vision subsystem and patented defect detection and classification algorithms enable real-time evaluation of defects. Its safety features provide users with a safe working environment, allowing users to safely use the machine without compromising their safety.
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