Used ADE / KLA / TENCOR UltraScan 9600 #9200036 for sale
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ID: 9200036
Wafer metrology system
Non-contact capacitive probe measurement:
Resolution: 10 um
Wafer thickness range: 400 to 800 Microns
E-PLUS Advanced / Thickness between stations
Signal effector arm robot
9600 Power supply
Non contact P/N type tester
Wafer resistivity: 0.1 to 200 ohm-cm
ADE 350 Arm controller
Auto A probe
ASC Controller
Includes:
Capable of measuring-lapped, etched, polished and patterned wafers - measures bow and warp
Site and global flatness
(2) Cassette input stations
(3) Cassette output stations
Prealigner station
Hi-RES Station
Operation manual
Maintenance manual.
ADE / KLA / TENCOR UltraScan 9600 is a state-of-the-art wafer testing and metrology equipment made for the semiconductor industry. It is designed to offer research and development scientists a powerful suite of modular test instruments to perform advanced wafer-level measurements. UltraScan is capable of automated metrology of a variety of test parameters such as stress-strain, film thickness, surface characteristics, electrical properties, and more. It can measure the structure, properties, and chemical composition of wafers with high accuracy and can be used for a wide range of surface and deep level metrology. The system has a 514mm² field of view, a 12.6μm image spot size, and a 0.6nm resolution. It can process up to 8 wafers per hour with a process throughput of 15 to 40 minutes per wafer, depending on the measurement needed. The unit is equipped with an imaging machine consisting of a charge-coupled device (CCD) sensor and an optical microscope to detect the measurement information on the surface of the wafer. It can read out, analyze, and store test images with high-precision calibration. This imaging tool is also used for focusing, positioning, and performing non-contact surface alignment. The asset is capable of taking a wide range of samples, such as silicon-on-insulator, multilayer wafers, thin films, polysilicon, wafer level packaging, and others. It also has the ability to support a variety of metrology techniques, such as axial scan, stress test, and etch depth. ADE UltraScan 9600 is controlled and monitored from a user-friendly interface. It supports data transfer, analysis, and storage over local or wide-area networks. It is equipped with a built-in software model that supports automatic diagnosis and sorting of wafers. Finally, the equipment is designed for easy maintenance and repair. Overall, KLA ULTRA SCAN 9600 is a powerful wafer testing and metrology system that offers highly accurate measurements and is capable of supporting a range of user-defined applications.
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