Used ADE / KLA / TENCOR UltraScan 9800 #9397208 for sale
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ID: 9397208
Wafer Size: 6"
Wafer characterization system, 6"
Non-functional parts:
ASM 9800 E-Squared module
ASM Vacuum chuck, 200 mm diameter.
ADE / KLA / TENCOR UltraScan 9800 is a state-of-the-art wafer testing and metrology equipment, capable of acquiring wafer-level information that is essential for efficient manufacturing processes. This system is ideal for automated electrical test, imaging, and micro/nanoscale metrology applications. ADE UltraScan 9800 can image chips at impressive resolutions up to 0.05µm and acquire detailed electrical characteristics, such as resistance, capacitance and leakage current, at high speeds. This combined capability is invaluable for both production and development environments, with imaging speeds up to 25kHz for individual spots. Uniquely, KLA UltraScan 9800 can detect tiny defects and obstructions with height resolution of 0.2nm, making it advantageous in the semiconductor industry. UltraScan 9800 can also measure semiconductor substrates up to 200mm in diameter, with a repeatability and accuracy better than ±0.02µm. Its automated vision unit performs fast and precise location of die centers and each individual chip, with the ability to handle different imaging areas and resolutions for different locations. The most impressive feature of TENCOR UltraScan 9800 is its vision compensation capability. This machine can perform a wide range of vision-based operations, such mapping, overlay and imaging correction. By using advanced feedback control systems, the Vision Compensation module of ADE / KLA / TENCOR UltraScan 9800 can automatically maintain a desired alignment and position of a wafer under imaging conditions. Moreover, it can also detect, inspect and map defects as small as 0.1µm across a wide range of wafer substrates. In terms of safety, ADE UltraScan 9800 conforms to EU, US and Japanese standards and comes with a user-friendly interface panel. All operations are lubrication-free and compliant with FDA, RoHS and CSA regulations. Furthermore, the tool can be integrated with the customer's existing software with API kits, making it even more convenient to use. To conclude, KLA UltraScan 9800 is an ideal solution for accurate and reliable wafer testing and metrology applications. With its high-speed imaging and metrology capabilities, this asset is designed for delivering reliable results in production and research environments. This model conforms to a various of safety regulations and its compatible with existing software, making it a perfect choice for semiconductor industry.
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