Used GOM ATOS III Triple Scan #9278050 for sale

GOM ATOS III Triple Scan is a leading wafer testing and metrology equipment that is used for advanced semiconductor processes in factories around the world. It utilizes three different optical triangulation sensors on a single positioning system that scans three-dimensional surface information from a range of different objects in a single, swift motion. The unit provides highly precise 3D images and measurements for high-end wafer measurements, including thin wafers, feature sizes below 5um, and aspect ratios greater than 1:20. GOM ATOS Triple Scan is the world's first integrated wafer testing and metrology machine to offer this level of accuracy. The tool also features a modular hardware and software platform, for both accurate and reliable 3D data collection. It offers a large measurement field with automatic alignment, real-time position-measurement capability, and a high level of flexibility in customized configurations. Additionally, an integrated vision asset measures x-y offsets of the field of view in a single scan. GOM ATOS Triple Scan is also equipped with advanced software capabilities. GOM proprietary ATK software enables fast data processing, multi-sensor synchronization, and multi-sensor registration. The model also comes with easy-to-use software with intuitive user interfaces, as well as a wide range of supported data formats for further analysis. Overall, ATOS III Triple Scan is a powerful and dependable 3D wafer testing and metrology equipment. It provides reliable and accurate surface measurement of thin wafers, feature sizes below 5um, and aspect ratios greater than 1:20. With its robust hardware and software capabilities, as well as its customizable features, GOM ATOS Triple scan is an ideal choice for advanced wafer inspection and testing.