Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9235016 for sale
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KLA / TENCOR / PROMETRIX 6200 Surfscan is a wafer testing and metrology equipment designed to provide reliable, accurate results through its advanced optical technology. The system includes a digital imaging and automated wafer analysis capability that enables users to measure wafer surface topography and patterning structures as small as 0.35 micron accurately. It is capable of assessing a multitude of test criteria including, but not limited to, wafer surface topography, defects, step height, and profile. KLA 6200 Surfscan employs the latest in optical metrology design, providing multi-angle metrology with a large field of view visualization. Using an Automated Focus Procedure, the unit can accurately adjust and measure the entire wafer surface in a single scan. The machine is also equipped with an Integrated Pattern Inspection Procedure, allowing for the accurate measurement of device features using a reference scan or template. The Surfscan 6200 achieves high resolution measurement of critical device patterns and surface topology by employing a combination of optical objective lenses. Utilizing an advanced Q-Focus Application for high-precision focus adjustment, the tool provides superior performance when assessing the height and size parameters of devices. Utilizing an OptiProbe Imaging technology, the asset can accurately identify shapes, edges and corners of patterns, compensating for non-uniformities and inconsistencies in the sample material. The Surfscan 6200 is highly accurate and reliable, able to meet the most demanding process variation requirements. It features user-friendly software, allowing for ease of use and quick setup times. With integrated software features such as 8-bit image recognition, edge detection, non-uniformity recognition, pattern inspection, and tilt measurement the model is capable of producing highly accurate results in a shorter amount of time. TENCOR 6200 Surfscan equipment is ideal for semiconductor manufacturers, with an advanced visual assessment capability that can identify some of the most common defects found in wafers. The system is suitable for the measurement of individual device features, enabling the evaluation of critical features such as the shape, length, and width of devices with greater clarity. Ultimately, PROMETRIX 6200 Surfscan offers an effective metrology solution for assessing wafer surfaces and patterns with sophisticated accuracy and reliability.
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