Used KLA / TENCOR 6420 Surfscan #293706991 for sale

Particle inspection system, 2"-8" Substrate thickness: 12 mm Single puck handling from single cassette or platform Defect sensitivity surface: 0.12 µm Defect sensitivity polished silicon: 0.12 µm at 95% capture rate Operating system: Windows 98 Illumination source: Argon-Ion laser: 30 mW Wavelength: 488 nm 1996 vintage.