Used KLA / TENCOR 6420 Surfscan #293754994 for sale
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ID: 293754994
Wafer Size: 4"-8"
Vintage: 1996
Non-patterned surface inspection system, 4"-8"
Defect sensitivity: 0.12 micron at 95% capture
Haze sensitivity: 0.02 PPM
Wavelength: 488 nm
Argon laser: 30 mw
Blue laser
Spot size: 90 µm
Scan frequency: 170 Hz
Scan pitch: 10, 20, 40 µm
Throughput: 120/6" WPH
Single puck handling from single cassette or platform
XY Coordinates
CD ROM Writer
Operating system: Windows 98
1996 vintage.
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