Used KLA / TENCOR 6420 Surfscan #293767212 for sale

ID: 293767212
Wafer Size: 8"
Automatic surface inspection system, 8".
KLA / TENCOR / PROMETRIX 6420 Surfscan is an automated, non-contact, wafer testing and metrology equipment designed to measure, analyze, and map structural features on a variety of wafer surfaces. The system provides a solution for applications including wafer-level lithography, resistivity measurements, defect classification, thin-film metrology, and MEMS wafer metrology. KLA 6420 Surfscan utilizes advanced imaging technology that enables the unit to accurately measure and analyze nanoscale wafer structures. The machine is capable of measuring down to 0.5nm and features pixel clock speeds up to 8MHz. The feature detection capabilities of TENCOR 6420 Surfscan are achieved by its 16-bit digital imaging array which utilizes an 8-MP CMOS image sensor with a fill factor of up to 90%. This allows for digital imaging with a substantially higher dynamic range than other systems. In addition to its imaging capabilities, 6420 Surfscan also includes powerful image processing algorithms to enable wafer defect detection. It features advanced algorithms for detecting low contrast features, which are useful for measuring process parameters. The tool is able to identify 50 feature types and perform 30 parameter tests. These features allow for rapid and accurate wafer measurements and defect identification. PROMETRIX 6420 Surfscan also features a high-speed data acquisition asset that can handle up to 10,000 wafers per hour. In addition, its communications capabilities enable remote access, control, and analysis of collected data. Its automated vision capabilities are also able to quickly identify, analyze, and report on defect characteristics and other wafer features. Overall, KLA / TENCOR / PROMETRIX 6420 Surfscan is an ideal tool for wafer testing and metrology tasks. Its advanced imaging capabilities, automated vision features, and high-speed data acquisition model make it an ideal choice for applications such as metrology, defect analysis and lithography. Its user-friendly interface and remote access capabilities make it easy to use and allows for comprehensive analysis and data management.
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