Used KLA / TENCOR 6420 Surfscan #293776063 for sale
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KLA / TENCOR 6420 Surfscan is an advanced wafer testing and metrology equipment that offers high-precision measurements for wafer surface characterization. It is a non-destructive metrology system that enables high yield and excellent defect detection for semiconductor and photomask inspection applications. The unit utilizes brightfield confocal scanning microscopy (CSM) technology to measure semiconductor wafer surfaces in three dimensions down to a resolution of 0.125 µm. A custom-designed x-y-z scanner provides high speed scanning over the entire area of a wafer, which is typically 8″, 12″, or 16″. The optomechanical design of the scanner is optimized to minimize image distortion, noise, and drift, making it ideal for accurate, repeatable measurements. It is equipped with an array of high-resolution camera options such as a color CCD and digital line array sensors. KLA 6420 Surfscan utilizes an advanced hybrid digital signal processor machine that provides a powerful compute architecture with dedicated hardware and software modules. The dedicated hardware and software modules enable fast processing of test data, detection of defects, and measurement of defect distributions. The tool also features multiple modes of operation, which enable customers to utilize multiple types of image analysis algorithms for their specific application. Data acquisition is flexible, enabling high sample rates to accurately characterize submicron structures. The 6420 also includes advanced visualization capabilities such as 3D surface renderings and animated topographical movies. This allows customers to create visualizations that clearly show the geometry and size of defects and non-uniformities. The asset also includes a wide range of powerful software tools for defect identification and analysis, which make it a versatile metrology solution. TENCOR 6420 Surfscan offers a powerful, reliable, and user-friendly solution for high-precision wafer testing and metrology. With its advanced CSM technology, high-resolution camera options, and digital signal processor, the model enables fast and accurate defect detection, as well as highly detailed wafer surface characterization. It also features advanced visualization capabilities and a wide range of software tools to make it a truly comprehensive wafer testing and metrology equipment.
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