Used KLA / TENCOR 6420 Surfscan #293777614 for sale

KLA / TENCOR 6420 Surfscan
ID: 293777614
Automatic surface inspection systems.
KLA / TENCOR 6420 Surfscan is a wafer testing and metrology equipment for high-volume wafer process and yield reliability. The system provides both high-speed, powerful measurement and automates the entire test process from chips to wafer to statistical analysis. KLA 6420 Surfscan is the latest in KLA/TENCORs series of wafer testing systems, which is capable of delivering precise non-destructive inspection measurements to a variety of wafer types. TENCOR 6420 Surfscan utilizes linear array technology to detect process defects, such as particles and particles-related defects on the wafer surface. It is equipped with an integrated back-surface camera to detect particles on the back surface of the wafer. To precisely detect defects, the 6420 employs TENCOR patented optical surface metrology technology which utilizes its AlphaTestTMTM measurement algorithm to optimize the contrast between particles and their surroundings. Additionally, 6420 Surfscan offers a wide range of capabilities including sample rate control, image quality control and particle vertexing. KLA / TENCOR 6420 Surfscan is designed to meet the high-volume needs that arise in semiconductor wafer processing. It is fast, precise, and accommodating to a variety of wafer types, as well as having a profiling feature for capturing detailed dimensional information from three-dimensional features. This feature is used to measure form characteristics such as height and curvature. To ensure the data is accurate, KLA 6420 Surfscan also uses its own statistical analysis process to analyze a profile, giving it the ability to determine what is normal or out of uniformity in the wafer surface. TENCOR 6420 Surfscan's probing unit minimizes the risk of damage to wafers during inspection. The wafer is scanned multiple times to ensure accurate measurements on the entire wafer. Additionally, the machine offers a variety of defect review and classification features, making it possible to quickly identify and classify defects in the field. This helps to quickly identify process issues and speeds up decision making. 6420 Surfscan is a must-have in semiconductor manufacturing laboratories due to its robust accuracy and reliability. With its fast measurements, quick defect review and classification processes, KLA / TENCOR 6420 Surfscan offers one of the most reliable wafer testing and metrology for production wafer testing.
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