Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9133277 for sale

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ID: 9133277
Measurement system, CPU Board, 200Mhz.
KLA / TENCOR / PROMETRIX 6420 Surfscan is a highly advanced, multi-application wafer testing and metrology equipment. Its sophisticated software environment and comprehensive hardware platform make it an excellent choice for production environments across a wide range of industries. It is specifically designed to increase the reliability and predictability of wafer testing and metrology activities, while reducing costs and uncovering important insights. KLA 6420 Surfscan employs a unique Optical CD Metrology (OCM) scanning system for precise measurements of both line widths as well as CD (critical dimension) values. It is equipped with an automated, non-intrusive sample stage 'Lights-Out' feature, allowing the unit to accurately perform full wafer surface inspections and detailed analysis of micro-structures for customers. The machine is capable of 2-axis tilt compensation, critical for probing and mapping highly planar structures. TENCOR 6420 Surfscan is also equipped with cutting-edge software capabilities, boosting the performance achieved by its hardware. It is capable of capturing and analyzing various types of high speed spectrums, including low and full resolution (1GHz/6GHz), and also performs a full range of defect inspections, such as TTV, measurement and process control assessments. Its software is built on a user-friendly interface, with the intention of reducing user errors and improving overall efficiency. PROMETRIX 6420 Surfscan also includes software-defined cleanroom capabilities, providing customers with full operational traceability via a series of chromium-based uploadable records. With proper calibration, it is capable of highly accurate measurements as low as 2nm. Outfitted with advanced particle imaging and counting (PIC) functionality, it can also acquire data from both wafers and reticles in both dry and wet processes. Overall, 6420 Surfscan represents the latest advancements in wafer testing and metrology systems. From its sophisticated optical CD metrology tool to its comprehensive software capabilities, this asset provides accurate testing, a wide range of rich features, and reliable, cost-efficient manufacturing.
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