Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9221587 for sale

KLA / TENCOR / PROMETRIX 6420 Surfscan is an advanced wafer testing and metrology equipment. The system can be used for various metrology applications such as critical dimension (CD) defect inspection, nanotopography, overlay alignment, wafer-level CD metrology, uniformity measurements, etc. The unit employs advanced optical, electrical, and mechanical technologies to meet the demands of high-precision measurement and production monitoring tasks. The key components of the machine include an automated wafer handling tool, a multi-station spin chuck stage, a large-area detector, a laser scanner, a scanning electron microscope (SEM), and an aligned telescope imaging asset. The automated wafer handling model allows for efficient sample transfer and loading between the different equipment components. The multi-station spin chuck stage is used to rotate the sample at speeds up to 4000 rpm. The large-area detector collects system data, including image data and other process quality parameters. This detector uses a unique charge-coupled device (CCD) and photomultiplier technology to provide high-speed signal capture and transfer. The 16-bit laser scanner utilizes laser beams for precise analysis of surface features, critical feature sizes, and defects. The SEM is used to generate sub-micron resolution images, which are used for defect inspection and measurement. The image acquisition processes are enhanced by the use of low-noise imaging chain. This enables high-accuracy size and shape measurements of smaller features. The aligned telescope imaging unit is used to measure sub-micron overlay alignment accuracies among different layers of the wafer. This machine combines a high-resolution video camera with a closed-loop XY motion stage and powerful image analysis software to provide the best overlay accuracy values. The tool also includes a monitor asset with a variety of input options. It allows users to view real-time sample images and other process-related information up to 1000 times magnification. The data is transferred and stored using the on-board hard drive, which can be backed up or downloaded to any remote device for further analysis or archival. KLA 6420 Surfscan model is a highly advanced equipment for wafer testing and metrology. It provides reliable and accurate results at high speeds, backed up with an excellent user experience. The system features automated wafer handling technology, high-quality imaging systems, and powerful software to provide accurate results for wafer-level CD metrology, nanotopography, overlay alignment, and uniformity measurement applications.