Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9285832 for sale

KLA / TENCOR / PROMETRIX 6420 Surfscan is a wafer testing and metrology (WTM) equipment that offers comprehensive wafer inspection with an impressive overall process throughput. The system is equipped with KLA broad family of variable wafer inspection options that support both MEMS and advanced CMOS technologies. It includes an optimized design that addresses critical issues such as repeatability, uniformity and performance. The 6420 supports up to six detectors in any combination of automated optical inspections and/or die-level surface measurements. It is equipped with a multi-position XY stage motion unit that supports linear stages and a variety of other optical inspection techniques. In fact, the optical stages of the 6420 also feature point-to-point alignment software to ensure accurate alignment of the sensors. This cutting-edge alignment software offers high accuracy, reduced field distortion and improved repeatability. KLA 6420 Surfscan also has an integrated substrate handling machine for improved substrate fidelity and extended tool life. It is equipped with a unique Auto-WideField asset, which enables users to further reduce stage wobble and improve substrate centering accuracy. This ensures more accurate measurements throughout the process. The Auto-WideField model is also complemented by TENCOR Laser Interferometric Overlay Equipment (LOMS), which significantly enhances overlay performance. In addition, TENCOR 6420 Surfscan features comprehensive data acquisition, analysis, visualization and reporting capabilities. This powerful software package allows users to quickly and easily analyze and view data, as well as run process optimization scripts. The 6420 also supports fully automated system control, which allows it to be integrated seamlessly into existing fab plants. PROMETRIX 6420 Surfscan is an advanced WTM unit that offers an impressive amount of features and cutting-edge technology. Its comprehensive capabilities and reliability make it an ideal machine for a wide variety of wafer inspection and metrology applications. The 6420 greatly enhances production efficiency and throughput, while also delivering an excellent return on investment.