Used KLA / TENCOR / PROMETRIX 7600 Surfscan #138855 for sale

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ID: 138855
Wafer Size: 8"
Vintage: 1995
Patterned wafer inspection system, 8" Model no: 269913 Chuck: Up to 8" Robotic handler 1995 vintage.
KLA / TENCOR / PROMETRIX 7600 Surfscan is a wafer testing and metrology equipment designed to provide users with the highest level of performance. KLA 7600 Surfscan is capable of automated wafer testing, defect detection, and metrology. Its features include automated wafer testing, secondary electron imaging, x-ray mapping, automated defect classification, and an automated particle size and shape analysis. TENCOR 7600 Surfscan has an automation system that utilizes robotic handling and vision based inspection to identify, measure, and evaluate surface defects on silicon wafers. This helps save operational costs and time during production, as well as reducing staff labor. Additionally, the unit offers a wide range of testing capabilities, from monitoring structural defects and variations to more complex functions, such as process monitoring and in-line particle analysis. For defect detection, PROMETRIX 7600 Surfscan features secondary electron imaging (SEI) technology, which offers a high-resolution image that is captured and displayed for the user. Furthermore, the machine provides x-ray mapping and variability assessment through its x-ray mapping module. This ensures that captured images are accurately displayed. The tool also employs the automated defect classification (ADC), which is used to identify and classify defects on the wafer. Additionally, 7600 Surfscan allows for comprehensive analysis of particle size and shape, allowing users to measure and analyze the particles on a wafer. KLA / TENCOR / PROMETRIX 7600 Surfscan also has a range of additional features, such as an environmental control chamber, up to seven different laser modes, fully-integrated calibration fixtures, and a user-friendly graphical user interface (GUI). Furthermore, the asset can be integrated with other parts of the semiconductor production model, such as KLA 7000 Steps, which supports wafer fabrication. Overall, KLA 7600 Surfscan is a powerful and reliable wafer testing and metrology equipment. It is able to accurately detect, measure and assess surface defects on silicon wafers, saving time and labour during production. Furthermore, it is capable of x-ray mapping and advanced particle size and shape analysis. All these features make TENCOR 7600 Surfscan an ideal solution for monitoring semiconductor production processes.
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