Used KLA / TENCOR / PROMETRIX M-Gage 300 #197077 for sale

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KLA / TENCOR / PROMETRIX M-Gage 300
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ID: 197077
Wafer Size: 6"
Thickness measurement system, 6".
KLA / TENCOR / PROMETRIX M-Gage 300 is a reliable, versatile, and high-performance wafer testing and metrology equipment that offers maximum accuracy and scalability for optical thin-film and overlay measurement, surface stress, profilometry and sheet resistance. This system allows for detailed process evaluation for wafers and substrates in the semiconductor industry. KLA M-Gage 300 has a large footprint and high throughput, which enables high accuracy, precision metrology with quick turnaround times. The unit features an innovative automated high-speed autofocus machine, providing unparalleled device accuracy and repeatability with minimal operator interaction, as well as numerous other high-end features that significantly reduce measurement time and maximize productivity. The tool is programmable to accommodate various standard metrology equipment, including white-light interferometer, spectroscopy, scatterometry, Raman, atomic force microscopy, and other optical and non-optical analysis modules. It also includes a precise dual-axis stage for overlay and dimensional feedback control, as well as precise automatic operation for sample cycling, ensuring accurate and repeatable measurements of thin films, surfaces, substrates, semiconductor devices, and microelectromechanical systems. TENCOR M-Gage 300 is an important tool for the semiconductor industry due to its ability to assess the electronic, mechanical, and optical properties of wafers and substrates in various sizes and shapes. The asset has a highly reliable built-in data acquisition model, making it easy to transfer data discreetly and securely. In addition, the reporting software gives detailed results enabling easy determination of process parameters. PROMETRIX M-Gage 300 equipment is also equipped with integrated touchscreen pedestal, enabling direct integration with semiconductor equipment that allows users to quickly connect multiple subsystems together and get accurate results through darkroom-compatible backlighting. This system is also compatible with CAD and sophisticated thin-film models. In conclusion, M-Gage 300 unit provides reliable and advanced wafer testing and metrology capabilities with a range of sophisticated features, making it a truly versatile and powerful tool for the semiconductor industry. It offers maximum precision, speed, and accuracy while providing improved data accuracy with minimal operator intervention.
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