Used KLA / TENCOR / PROMETRIX 6200 Surfscan #293602390 for sale

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ID: 293602390
Vintage: 1992
Inspection system 1992 vintage.
KLA / TENCOR / PROMETRIX 6200 Surfscan is an advanced automated surface metrology equipment designed to measure surface quality of wafers used in the semiconductor industry. It provides comprehensive wafer testing and metrology capabilities through its multi-channel, multi-axis imaging capability. KLA 6200 Surfscan system is used to measure surface roughness, profile and contour characteristics, and other critical aspects of wafer surface quality. The 6200 is equipped with a pattern recognition unit, which enables users to create their own measurements from images of the wafer surface. The machine can be used with either conventional mechanical scanning techniques or advanced interferometric techniques that provide higher resolution results. TENCOR 6200 Surfscan is optimized for high throughput and efficient use. It includes three main components: a high-resolution digital camera, a precision x-y stage for sample scanning, and a high-resolution imaging tool. The camera is used to capture video images of the wafer surface and generate an image map of its features. The precision stage is used to scan the wafer by moving it relative to the camera along two axes. The high-resolution imaging asset then captures data from each point of the scanned surface to create a 2D image. The model is capable of measuring surface features down to sub-nanometer accuracy. The equipment produces highly accurate and repeatable results with minimal operator involvement. It is compatible with a wide range of substrates, such as monocrystalline, polycrystalline and epitaxial silicon, and can measure surfaces with curved, flat or stepped shapes. 6200 Surfscan is easy to use and operates via a Windows PC interface. The graphical user interface enables users to define their own parameters for measurements, display results in real-time, and generate detailed reports for engineering analysis. And its automated wafer testing and metrology capabilities ensure that wafers can be verified for quality and accuracy. Overall, PROMETRIX 6200 Surfscan is an ideal tool for evaluating the surface quality of semiconductor wafers. The system's combination of high resolution imaging, automated scanning, and real-time reporting makes it an ideal solution for semiconductor process control and quality assurance.
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