Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9078054 for sale

KLA / TENCOR / PROMETRIX 6200 Surfscan
ID: 9078054
Vintage: 1993
Bare surface inspection system, 1993 vintage.
KLA / TENCOR / PROMETRIX 6200 Surfscan is a high performance wafer testing and metrology system designed to meet the demanding requirements of the semiconductor industry. The Surfscan 6200 can accurately measure all critical parameters of wafers, including surface flatness, critical dimensions, overlay registration and feature size. The heart of the system is the award-winning proprietary OpticsairTM sensor, which provides superior sensitivity and fast dynamic range over the other comparable systems on the market. It features a unique hollow rod optical design, which reduces vibration and improves sampling accuracy by significantly reducing the noise floor. The OpticsairTM sensor can measure any form of surface defects, as well as being able to characterize feature size and shape. The 6200 features a large variety of performance enhancing options, including an Imaging & Measurement Processor (IMP) with advanced mapping and serial patterning capabilities, a state-of-the-art Accu-Centric measurement head for precise CD measurements, and an automated wafer tracking module with full serial position control. The 6200 also provides users with the ability to integrate up to four independent wafer stages, which allows for a high degree of flexibility when measuring various wafer sizes. The Surfscan 6200 can also be linked to other equipment, such as SPC systems and automated handlers, for systematic fault recognition, analysis and repair. In addition to the standard wafer testing capabilities, the 6200 also offers advanced performance targeting for process control, an automated processing control (APC) module for improved performance monitoring, and can be integrated with metrology and analysis tools. In summary, KLA 6200 Surfscan is an advanced wafer testing and metrology system that offers unsurpassed speed, accuracy, and flexibility. It is ideal for semiconductor manufacturers seeking to reduce time-to-market, improve process consistency, and reduce wafer costs.
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