Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9082678 for sale

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ID: 9082678
Vintage: 1991
Wafer inspection system Currently installed in a Class 100 cleanroom 1991 vintage.
KLA / TENCOR / PROMETRIX 6200 Surfscan is a wafer testing and metrology equipment designed specifically for high-precision, high-throughput semiconductor inspection requirements. This system is capable of providing detailed, 3D measurement of surface topography along with shape analysis functions for defect measurements. KLA 6200 Surfscan offers high performance, precision optical imaging and provides a wide field of view for a complete wafer inspection over a wide range of substrate types. This unit is available in a variety of configurations, from single wafer to cluster configurations and a variety of scan speeds from 1 mm/sec to 10 mm/sec as well as various resolution diffraction angle settings. TENCOR 6200 Surfscan is the latest high performance wafer inspection machine that utilizes advanced imaging technology and a fast data transfer protocol. This tool utilizes a patented OptiWow process, which allows for a much larger capture area than previously possible. This leads to more accurate results than traditional methods, and is much faster than manual analysis. 6200 Surfscan asset is equipped with a precision 6" x 6" objective lens, allowing for resolution levels down to 10nm. This performance allows for the detection of defects and sub-surface defects that would typically require higher resolution techniques such as electron beam microscopy. The model is capable of analyzing wafers in mirrored and cross-axis modes with the added advantage of providing color-coded imaging for added clarity of images. The advanced analytical capabilities of PROMETRIX 6200 Surfscan help to facilitate improved throughput. The equipment is capable of achieving high throughput rates for large quantities of wafers. The system has built in capabilities that enable it to automatically detect and log defects signs. It also has the ability to track a wafer's quality and surface topography data over time. In addition to this, KLA / TENCOR / PROMETRIX 6200 Surfscan can also perform non-contact, non-destructive etch profiling. In conclusion, KLA 6200 Surfscan is a wafer testing and metrology unit that provides advanced imaging technology, fast data transfer protocol, and built in analytics and logging capabilities for improved throughput. With its precision 6" x 6" objective lens, TENCOR 6200 Surfscan can provide very accurate results and is an excellent choice for any semiconductor manufacturer or research laboratory. Furthermore, this machine is reliable, versatile, and economical.
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