Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9152152 for sale
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KLA / TENCOR / PROMETRIX 6200 Surfscan is a wafer testing and metrology equipment designed to provide high-speed, high-precision wafer testing and metrology. KLA 6200 Surfscan is a cutting-edge system equipped with many advanced features, such as a capacitive head, three-axis stage, and an advanced 100 mm industrial wafer handler. The unit is capable of testing wafers of various sizes, including 200, 300, and 400 mm. The machine is designed with a high-precision, three-axis stage tool, with a range of travel of up to 150mm with a resolution to less than 0.2mm, allowing for precise alignment and absolute positioning. It also offers a wide dynamic range for accurate probing and precise data acquisition. The asset is also equipped with an advanced capacitive head, which provides greater sensitivity and higher dynamic range, enabling higher accuracy measurements. It is capable of taking measurements over a range of 5 nanometers to 15 micrometers with a resolution of up to 0.01 nanometers. TENCOR 6200 Surfscan has an advanced 100mm industrial wafer handler which allows for edge detection and accurate inspection of wafers. It has a load lock depth of up to 200mm and wafer acquisition and transport accuracy of ±3.0μm. It is also capable of providing both coarse and fine alignment of multiple wafers, up to 200mm. The model has an automated calibration equipment which can be adjusted for different measurements and allows for the adjustment of parameters such as focus, exposure, gain, and offset. The system is also equipped with a user-friendly graphical user interface that allows for the control and monitoring of parameters and settings. Additionally, PROMETRIX 6200 Surfscan offers a variety of options for data analysis, providing users with the ability to analyze data in a variety of ways, including peak analysis, stand-alone libraries, recipe comparison, etc. This enables users to quickly detect and diagnose faults in their wafers. Overall, 6200 Surfscan is a cutting-edge unit that is designed to provide high-speed, high-precision wafer testing and metrology. Along with its precision and accuracy, it provides a range of features that enable users to quickly diagnose problems with their wafers.
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