Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9159142 for sale
KLA / TENCOR / PROMETRIX 6200 Surfscan is a wafer testing and metrology equipment designed to measure and analyze surface features such as microscopic protrusions (or steps) and pits in a device under test (DUT). This system features a sampling rate of up to 10 kHz, a beam spot size of 10 µm, and a resolution of up to 1 µm. The unit is composed of three main components: the Scan Head that houses the optics, electronics, and mechanics; the measurement engine; and the analysis user interface. The Scan Head is responsible for collecting and generating the metrology data, and is equipped with a laser diode to scan the DUT wafer. The light from the laser is focused and then reflected back to the Scan Head, creating an image of the surface topography of the DUT. This image is then processed by the measurement engine, which acquires the image data and performs filtering and optimization algorithms. The data is then uploaded to the analysis user interface, which is used to view the scan profiles and the processed data. Parameters such as step heights, pit sizes, surface roughness, and underrepresented features can be extracted from the scan profiles. In addition, the machine is equipped with "SmartScan" technology, which is based on the integration of surface analysis and code-driven optimization algorithms. This technology enhances the tool's capability for optimizing yield and reducing the need for costly parametric measurements. A graphical user interface (GUI) is also provided to aid with operating the asset, as well as for viewing and analyzing the data. In conclusion, KLA 6200 Surfscan is a reliable and efficient wafer testing and metrology model that provides high-accuracy results in a high-speed manner. Its features such as "SmartScan" technology, graphical user interface, and scanning rate make it a valuable tool for determining the microscopic features and defects of substrates.
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