Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9230009 for sale
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ID: 9230009
Wafer Size: 4"-8"
Inspection system, 4"-8"
Wafer surface contamination analyzer: Non-patterned wafers
Color coded defect maps
Laser type wavelength: 30 nm
Particle sensitivity: 0.10 µm at 95%
Measurement range: 0.09 - 9999 µm
Haze sensitivity resolution: 0.05 ppm
Repeatability: 0.5% at 1
Surface haze detection.
KLA / TENCOR / PROMETRIX 6200 Surfscan is an advanced wafer testing and metrology equipment designed for production environments requiring high-throughput surface analysis of semiconductors and photovoltaic wafers. The system uses non-contact ellipsometry to measure the optical properties of a sample. It can be used to determine the flatness, reflectivity, stress profile, and surface roughness of a semiconductor wafer with sophisticated scanning software. The unit is comprised of three components: the Scan Head, the Measurement Chamber, and the Compute Node. The Scan Head contains a laser-based sensor, and is mountable on the measurement chamber to provide rapid, efficient sample measurements. The Measurement Chamber is a sealed and temperature-controlled environment, which can be equipped with the latest automation technology to allow faster sample measurements while eliminating manual handing. The Compute Node is a computer that is used to store results, configure scans, and guide the automated measurement process. The machine is equipped with powerful analysis software for advanced analysis and report generation. The tool features automated bidirectional stitching to ensure complete analysis coverage across the scan plane, enabling large wafer-level analysis. KLA 6200 Surfscan asset offers a variety of measurement techniques, including wavelength scanning ellipsometry (WSE), critical dimension (CD), wave front error (WFE), surface characterization, and non-destructive testing (NDT). WSE measures the change in optical properties of a sample as a function of wavelength. CD is used to measure features on a sample, and WFE is used to track changes in surface flatness. Surface characterization is used to determine physical characteristics of a sample, such as porosity, grain size, and composition. Lastly, NDT is used to detect defects and is used to measure the electrical properties of a sample. Overall, TENCOR 6200 Surfscan is an advanced wafer testing and metrology model that offers precise measurement capabilities for production and research environments requiring high-throughput surface analysis. The equipment is equipped with sophisticated scanning software, automated sample handling, and automated analysis software for advanced analysis and report generation. The system offers a range of measurement techniques and provides optical property measurement, surface characterization, and non-destructive testing capabilities.
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