Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9245004 for sale
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ID: 9245004
Wafer Size: 8"
Vintage: 1992
Inspection system, 8"
Capable of 6"
Laser has been replaced
1992 vintage.
KLA / TENCOR / PROMETRIX 6200 Surfscan is a wafer testing and metrology equipment used for inspecting semiconductor wafers. Using proprietary high-resolution optics and image-processing algorithms, it is designed to detect, measure and analyze defects and yield-critical patterns during wafer production. KLA 6200 Surfscan comprises of a top end station and two primary systems: an image acquisition and analysis system, and a defect review unit. The image acquisition and analysis machine ensures effective imaging workflow and image delivery, while the defect review tool makes it possible to accurately evaluate and classify pattern data and detect defects. TENCOR 6200 Surfscan features an optimal platform for patterned wafer inspection. It offers both optical and contact surface inspection capabilities as well as advanced defect review and automatic defect classification. The asset is also capable of patterning wafers up to 8 inch in size or 9 inch square and has an optimized signal-to-noise ratio, courtesy of a logical layout that maximizes precision and minimizes vibration and temperature fluctuation. PROMETRIX 6200 Surfscan also has automated wafer tracking that expedites inspection process for faster turnarounds. With advanced detection algorithms, such as Auto-Edge-Detect (AED), auto-focus, and the latest in CMOS imaging technology, it can detect even the most challenging and tiny defects. It also has a particle pickup counter which can accurately count the number of particles per chip, which eliminates the need for manual counting. 6200 Surfscan also includes a wide range of interchangeable lenses to meet virtually any inspection requirement. It provides the option of full-wafer scan and spot-scan techniques that work together to reduce inspection time. The model also includes a built-in calibration function that allows users to quickly calibrate the imaging equipment and inspect wafers in multiple formats. KLA / TENCOR / PROMETRIX 6200 Surfscan is an invaluable tool for inspecting and metrology of semiconductor wafers in production. It ensures consistent performance and yields excellent results with ease of operation. With its innovative features and advanced technologies, it is an ideal choice for production environments with rigorous wafer inspection requirements.
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