Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9245958 for sale

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ID: 9245958
Vintage: 1992
Inspection system 1992 vintage.
KLA / TENCOR / PROMETRIX 6200 Surfscan is a critical dimension and film thickness metrology tool developed to serve semiconductor manufacturers. The equipment applies a 3-axis scanner for fast quasistatic scanning up to 100Hz and dynamic scanning up to 6kHz. It is ideal for three-dimensional metrology of wafers, wafer-level packages and thin-film substrates, as it is capable of measuring critical and flatness on any surface, including flat, curved, stepped, and stepped-in. KLA 6200 Surfscan system has a wide measurement range of 0-32 microns with a resolution of 0.1microns, making it suitable for precise and accurate measurements. The three-axis scanner also guarantees a high repeatability in all 3 axes of scanners and ensures a high level of repeatability in the position measurement to provide consistent measurements. With its 3-axis scanner design, TENCOR 6200 Surfscan unit can effectively measure sophisticated geometries, such as stepped-in surfaces. The machine also features an intuitive and user-friendly graphical user interface, with comprehensive features that facilitate operation and analysis. It also has integrated proprietary algorithms that allows for automatic surface measurement, correcting for effects such as instrument tilt, stub sampling and detector offset. In addition, 6200 Surfscan tool can also be calibrated at any time to ensure accurate measurements for any process or product changes. PROMETRIX 6200 Surfscan asset also has a comprehensive suite of software tools that are specifically designed for semiconductor wafer testing and metrology. These tools allow for the analysis and characterization of a wide range of parameters for different materials, devices, and applications. One of its most important tools is its Critical Dimension Software, which can measure and compare critical dimensions with corresponding mold dies and analyze critical dimension changes over time. Overall, KLA / TENCOR / PROMETRIX 6200 Surfscan model is an ideal solution for semiconductor manufacturers looking to increase efficiency and accuracy in the wafer testing and metrology process. Its wide range of features, such as a high measurement range, high repeatability, and intuitive user interface make it a powerful, comprehensive and reliable solution for these manufacturers. Additionally, its software suite ensures a comprehensive analysis of the different parameters and applications, ultimately providing the user with the ideal tool to confidently analyze critical dimension changes and ensure a successful and accurate wafer testing and metrology process.
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