Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9249954 for sale

KLA / TENCOR / PROMETRIX 6200 Surfscan
ID: 9249954
Wafer particle inspection system.
KLA / TENCOR / PROMETRIX 6200 Surfscan is a wafer testing and metrology equipment that provides high resolution imaging and automated measurement of the physical and geometric properties of semiconductor wafers. The system uses advanced optical and imaging technology to obtain precisely measured topographic images of the wafer surfaces. It's capable of measuring both nano-scale and micro-scale features, and its extensive measurement capabilities are used during wafer fabrication to help pinpoint process and surface issues that affect yield. KLA 6200 Surfscan unit features automated sample loading and unloading, multiple stage correction for enhanced image clarity, and an easy-to-use graphical user interface. It also provides wide-field imaging over a large area, quantifiable measurements, device-to-device uniformity, and data traceability. TENCOR 6200 Surfscan is designed to work with devices as small as 100nm pitch nanostructures and features an optimized optical measurement engine that can measure up to 1000 micron-wide fields. Its dynamic surface imaging and measurements provide highly accurate results that can be used by researchers and engineers to predict wafer performance and determine process problems. The machine also features a metrology workbench to enable rapid, repeatable, and statistically meaningful measurements. This metrology workbench includes an array of user-selectable measurement functions such as critical dimension (CD) measurement, line edge Roughness (LER), Local Edge Roughness (LER), 360 degree lighting for edge scans, and profile measurements. PROMETRIX 6200 Surfscan tool also features automated inspection, making it possible to identify process problems and inconsistencies quickly. Automated inspection applies a range of algorithms to detect surface flaws, such as micropores, bubbles, and striations. It also offers an advanced defect review suite that allows users to visualize defects in situ. 6200 Surfscan asset is a reliable and versatile piece of machinery, offering a wide range of features to improve wafer testing and metrology operations. Its automated wafer handling, high resolution imaging, and comprehensive measurement capabilities enable improved monitoring of wafer manufacturing processes, helping to improve yield and increase production throughput.
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