Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9272264 for sale

KLA / TENCOR / PROMETRIX 6200 Surfscan is a state-of-the-art wafer testing and metrology equipment for research and production environment. It enables the rapid and accurate measurement of electrical properties such as resistivity, permittivity, capacitance and leakage parameters of semiconductor materials. This system was designed to support a wide variety of process nodes and the latest technology, including foundry, fab and engineering libraries. KLA 6200 Surfscan features a powerful, high-precision, 5 megapixel CCD imaging sensor which can capture images of wafer features with 5 micrometers resolution due to its high-resolution image processing algorithms. The large-format 9.1 inch view was designed to support high research and production throughputs. The unit not only detects defects and process-induced variations in wafer properties, but also helps identify potential random and systematic product yield losses. TENCOR 6200 Surfscan is equipped with advanced process characterization and data handling capabilities, including a built-in database of process recipes and stored measurements. The machine's advanced metrology suite also includes a 3D measurement platform with a large range of process characterization tools such as scatterometry, surface roughness and film thickness, as well as more advanced techniques like stress analysis, edge and profile liftoff. PROMETRIX 6200 Surfscan supports various wafer sizes from 4" to 12", depending on the exact configuration. Optional features include automated wafer handling, throughput optimization, and an automated optical inspection tool for detecting small defects. The asset also comes with an intuitive user interface and a comprehensive reporting software for monitoring process metrics and obtaining data about defects, variations and variations between lots. 6200 Surfscan is a cost-effective solution for high-precision wafer testing and metrology in research and production environments. With its advanced metrology functions and intuitive design, KLA / TENCOR / PROMETRIX 6200 Surfscan provides an efficient and accurate method for obtaining the most out of wafer testing and metrology.