Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9299889 for sale

KLA / TENCOR / PROMETRIX 6200 Surfscan is an advanced wafer testing and metrology equipment. It is capable of performing non-destructive, layer-by-layer visual inspections of wafers that measure 6-12 inches in diameter. This system is equipped with a comprehensive suite of parametric, overlay, and Defect Location Analysis (DLA) capabilities. The unit can measure with nanometer accuracy, making it suitable for the most demanding applications in semiconductor manufacturing. KLA 6200 Surfscan utilizes advanced optics designed to collect high-resolution images of the entire wafer surface. An automated laser height profiling machine allows for accurate three-dimensional surface analysis. The tool also features an automated defect detection asset using Electron Beam Cross Sectioning (EBCS) to detect sub-micron particles and defects. To ensure adequate repeatability and accuracy, TENCOR 6200 Surfscan is equipped with an automated calibration model using standards and reference wafers. It also features industry-leading mega-point and linearity testing for high-resolution metrology measurements. This equipment is designed to be tightly integrated with in-fab wafer management systems, allowing for communication between the Surfscan and other systems in the fab. 6200 Surfscan maximizes system uptime and efficiency with advanced tools to reduce overall cycle time. It includes an intuitive user interface with context-sensitive menus, as well as comprehensive data review and analysis tools for quick feedback on defect detection performance. The unit also features automated recipe development and advanced recipe management tools. PROMETRIX 6200 Surfscan is a significantly advanced wafer testing and metrology machine. It combines advanced optics with automated sensor and calibration capabilities to offer sub-micron resolution and improved repeatability and accuracy for critical wafer surface analysis. Innovative user interface and data management tools make this tool a top choice for manufacturers that require fast, accurate wafer analysis.