Used KLA / TENCOR / PROMETRIX 6420 Surfscan #192511 for sale

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KLA / TENCOR / PROMETRIX 6420 Surfscan
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ID: 192511
Patterned / Non-patterned darkfield defect inspection system.
KLA / TENCOR / PROMETRIX 6420 Surfscan is a wafer testing and metrology equipment that can measure and analyze surface topology with high speed, accuracy, flexibility, and repeatability. The system utilizes advanced scanning and imaging technology to detect microscopic surface defects and provide the most detailed analysis of surface and defect characteristics available in current production environments. KLA 6420 Surfscan employs a unique, high resolution, 3D-based imaging unit, capable of analyzing any material, be it silicon, glass, or anything else used to manufacture integrated circuits. The profile generated by the 3D imaging machine is used to accurately measure surface topology, isolate surface defects from the topographical background, and calculate measurement results such as step heights, surface roughness, and trench widths. TENCOR 6420 Surfscan also implements a state-of-the-art stage subsystem. Specifically, it consists of precision linear bearings, true vertical stroke, and computer-controlled stages that enable precise positioning of the sample stage across the x, y, and z axes. With built-in calibration software, the tool consequently achieves optimal pattern recognition performance, by ensuring that the data collected is properly tracked and compared for replication. Another key asset component is the advanced defect inspection algorithm. This algorithm can detect and classify defects with superb accuracy, and can quickly identify subtle topographical differences between neighboring areas of a chip. With 6420 Surfscan model, users can also utilize 3D optical profilers, such as polarization-enhanced confocal microscopes, to obtain more precise measurements of the surface. In addition, PROMETRIX 6420 Surfscan provides the user with total visualization and management of the process data. Advanced data analysis tools, like the defect analysis engine, can automatically detect and characterize thousands of defects within a single substrate, storing comprehensive reports of the inspection process. Lastly, KLA / TENCOR / PROMETRIX 6420 Surfscan enables the user to ensure optimum product quality. With its stringent quality control methods, the equipment allows manufacturers to identify and eliminate defects before costly errors occur in the product. As the flagship tool of KLA, KLA 6420 Surfscan is the perfect choice for those looking to maximize their quality control capabilities.
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