Used KLA / TENCOR / PROMETRIX 6420 Surfscan #293623028 for sale

KLA / TENCOR / PROMETRIX 6420 Surfscan is a multi-sensor equipment designed for fast and accurate in-line wafer testing and metrology. It provides a combination of optics, lasers, sensors, and custom software to provide advanced surface analysis, defect identification, and dimensional metrology across a variety of substrates. The 6420 features a unique optical configuration that is based on a sophisticated modified Miller triple-beam scanning layout. This scan pattern allows for rapid, high-resolution imaging with variable focus, all without compromising performance. Additionally, the system enables the measurement of very fine features, as well as larger and irregular shaped features. The 6420 also features a laser-optic unit as part of its metrology package. This includes a Fourier transform profilometer, allowing for extremely accurate surface mapping. This is especially helpful in applications where surface topography characterization is required. The 6420 is equipped with an integrated run-to-run control feature which allows operators to monitor sample status in real-time and ensure repeatability. Additionally, there are various hardware and software options available to allow for customization of performance, accuracy, and testing speeds. Lastly, the software package provided by KLA includes a suite of automated analysis tools, such as defect identification (for both contaminant and structural defects), pattern matching, metrology tools, and phase contrast imaging. All of these tools, along with the option for custom programming, allow for maximum flexibility and ease of use in a variety of wafer-testing and metrology applications. Overall, KLA 6420 Surfscan is a powerful and versatile machine for quickly, accurately, and reliably testing and measuring a variety of substrates. With its combination of advanced optics, laser-optic systems, and powerful software, it is an excellent choice for in-line testing and metrology requirements.