Used KLA / TENCOR / PROMETRIX 6420 Surfscan #293625758 for sale

KLA / TENCOR / PROMETRIX 6420 Surfscan is a wafer testing and metrology equipment designed to detect surface defects on semiconductor wafers. Its patented Micro Scan technology increases defect detection sensitivity and repeatability over other existing defect detection systems. The Surfscan is designed to rapidly detect true microscopic defects on advanced optical, lithographic and FEOL layers. The Surfscan 6420 is equipped with a digital vision system connected to a high-fidelity camera that is driven with a precise, repeatable motorized wafer stage. The Surfscan 6420 is capable of measuring up to two wafer diameters in one pass at a resolution of 500 nm. The unit includes both linear and ring scan inspection capability to provide 100% coverage of the entire wafer. The Surfscan 6420 utilizes a true four-dimensional combination of Scanning Electron Microscopy (SEM) and Broad Field Defect Review (BFDR) imaging to collect and analyze sample images. This allows the Surfscan 6420 to detect and quantify a wide range of defect types including flipped or missing dies, at resolutions of up to 500 nm. The Surfscan 6420 provides the user with various algorithms to simplify the process of defect diagnosis and classification. These algorithms enable the machine to identify presumptive defects and assign them to "classifiers" based on user-defined criteria. Highly accurate and reliable defect location can be achieved through auto-centering and alignment features. Defect images analysis is streamlined through the use of Surfscan 6420's suite of user-configurable summary statistics and trend reports. These features allow the user to quickly identify and document the various defect types that may be present on the wafer. Additionally, the tool's software ships with a library of standard defect classification terminology to simplify and streamline defect reporting. The Surfscan 6420 comes with a comprehensive software package that provides automatic quality control, post-processing and defect qualification. The software also offers integrated GIS tracking and comprehensive wafer data analysis capabilities. Furthermore, it is engineered to provide reliable, repeatable performance with minimal training and maintenance costs. All in all, KLA 6420 Surfscan is an advanced wafer testing and metrology asset designed to accurately and reliably detect surface defects on semiconductor wafers. With its high-fidelity imaging, configurable algorithms and comprehensive software, the Surfscan 6420 is an ideal solution for ensuring the highest quality of production.