Used KLA / TENCOR 6420 Surfscan #9025222 for sale
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ID: 9025222
Wafer inspection system
(1) Open cassette
Secs II interface
X-Y Coordinate
Light Tower
CE Marking
220 / 240 Voltage
Soft version 3.3B under MS DOS
External fan
Standard Puck
Failure on board "Haze"
Stored in a warehouse and wrapped
1996 vintage.
KLA / TENCOR / PROMETRIX 6420 Surfscan Wafer Testing and Metrology Equipment is a high precision, advanced system that can be used to accurately measure, verify, and analyze the surface condition of wafers. This unit is equipped with a variety of digital detectors, automated software, and features that provide the user with a complete and comprehensive wafer testing and analysis solution. KLA 6420 Surfscan comes equipped with an automated motion stage that can be configured to scan up to 200mm diameter wafers. Additionally, the automated stage offers high precision, bidirectional repeatability, and stability. TENCOR 6420 Surfscan also has an advanced optical machine which allows for a large, wide standard scan field, and the ability to measure in 8 separate areas, making it very precise and accurate when measuring large samples. Furthermore, the tool has a unique scanning algorithm that allows it to accurately display the speed of the scan, the number of points per second, and the resolution of the images. The digital detectors of the asset are fully automated, allowing the user to acquire extremely accurate and reliable data. The digital detectors come with a built-in haze correction and RGB equalization functions, and they can be configured to read out in either linear or logarithmic levels. Additionally, the detectors are capable of measuring both surface profiles and film thicknesses. The software of the model allows the user to make precise and comprehensive measurements, while also generating data in various exportable formats. The software features a variety of automated analysis and reporting tools, and is designed to be intuitive and user friendly. Overall, PROMETRIX 6420 Surfscan Wafer Testing and Metrology Equipment is an advanced and precise system that can be used to measure and analyze the surface condition of wafers with an unprecedented level of precision and accuracy. This unit is equipped with a variety of digital detectors, automated software, and features that are designed to provide the user with a complete and comprehensive wafer testing and analysis solution.
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