Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9057232 for sale

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ID: 9057232
Non-patterned wafer particle measurement system, 4"-8" Model #: 289108 Currently configured for 8" Cassette interface: (1) Open cassette SMIF Ready Operating system: Win98 Application SW verision: 4.2 Standard puck Blower unit Blower power cable Main unit power cable Particle sensitivity: 0.10 um Haze sensitivity: 0.02 PPM Count accuracy: +/- 1% No SMIF Load-port 208 V, 60 Hz, Single phase, 17 A 1997 vintage.
KLA / TENCOR / PROMETRIX 6420 Surfscan is a state of the art wafer testing and metrology equipment that is designed to perform advanced testing and analysis on silicon wafers during the semiconductor fabrication process. This system provides superior accuracy, precision, and throughput, making it an ideal choice for wafer metrology needs. It is equipped with a versatile and reliable optical platform and provides advanced automated wafer-mapping, defect imaging, and defect review capabilities. KLA 6420 Surfscan utilizes Windows®-based metrology software that offers unparalleled control and processing power. It enables users to customize tests and designs with fast and efficient data processing and reporting. The unit features large-scale metrology modes, with a 32-point grid scanning array that delivers improved sampling coverage on substrate mats of any size and thickness. It includes a patented SmoothScan™ platform, with advanced optics reduction and adaptive speed control, that reduces non-uniform sample rotation, yielding more accurate measurements. TENCOR 6420 Surfscan is also equipped with special dust protection filters that eliminate dust particles and reduce mechanical stress on wafers. It is capable of achieving fast and accurate metrology measurements, including wafer thickness, zone thickness, total surface area, ridge mounting gap, and die-to-die mapping. It also features a powerful automated defect recognition and analysis capability, so wafer inspections can be completed quickly and efficiently. 6420 Surfscan is a high-performance and highly accurate machine that features multiple imaging modes, including bright field and dark field imaging. It is also equipped with an integrated Image Analysis Tool (IAS), which provides automated testing and analysis during the wafer fabrication process. IAS software enables quick issue resolution and reduces testing and analysis time. The asset is fully integrated with other metrology systems, making it easy to transfer and share data. PROMETRIX 6420 Surfscan is an advanced and reliable model that is designed to meet the demanding requirements of production lines for wafer metrology and testing. It provides unbeatable accuracy, precision, throughput, and storage capacity, making it an essential tool for any semiconductor fabrication process.
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