Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9207287 for sale

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ID: 9207287
Vintage: 1996
Inspection system 1996 vintage.
KLA / TENCOR / PROMETRIX 6420 Surfscan is a advanced wafer testing and metrology equipment designed for precision analysis of electrical and optical properties of semiconductor wafers. This system utilizes advanced optical and electron beam techniques to scan both shallow and deep sub-micron features to detect defects, contaminants, and electrical properties of each wafer. KLA 6420 Surfscan works by taking a high-resolution picture of the surface of the wafer, which is then converted into an electrical map. This electrical map is then used to measure various parameters such as the electrical potential, surface features and film thickness. Additionally, TENCOR 6420 Surfscan is able to accurately measure the depth of trenches and vias, as well as the roughness of the wafer surface. This allows for the detection of defects and contaminants that may not be visible to the naked eye. 6420 Surfscan also has advanced functions such as a comparison tool that allows for the comparison of properties between wafers and a CAT (Comparative Analysis Tool) that allows for the easy comparison of various data points. PROMETRIX 6420 Surfscan utilizes advanced high-resolution scanning techniques, including e-beam and laser scanning, to accurately measure the topography of the wafer. This gives KLA / TENCOR / PROMETRIX 6420 Surfscan the ability to detect defects and contaminants embedded into the wafer surface and structure. By using KLA GeoCorrectTM technology, KLA 6420 Surfscan can automatically correct for any surface roughness and other non-Geometric factors. TENCOR 6420 Surfscan is a powerful unit that contains a variety of features designed to help speed up production and improve quality control. The machine has been designed to be easy to use, with intuitive menus and buttons that allow for quickly exploring data acquired by 6420 Surfscan. By utilizing advanced scanning techniques, PROMETRIX 6420 Surfscan is capable of analyzing and accurately measuring wafer properties with an unprecedented degree of precision.
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