Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9209993 for sale
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ID: 9209993
Wafer Size: 4"
Vintage: 1995
Unpatterned surface inspection system, 4"
Set up for 4" x 4" substrate
Non patterned wafer film surface analyzer
Sub micron particles:
Polysilicon
Tungsten
Epitaxial
Polished silicon
Round or rectangular subtrates: 4", 5", 6", 8"
Configured for 4 x 4 square wafers
Setup with CD rom
Automatic wafer handler
Capture rate on bare silicon: 0.1 um @95% Sensitivity
Spatial resolution: 50 um
Contamination less than 0.005 particles / cm² greater than 0.15 um
Haze sensitivity: 0.02 ppm
Defect map and histogram with zoom
2D Signal integration
Non contaminating robotic handler
X-Y Coordinates
Random access for sender / Receiver unit
SECS GEM Capable
Illumination source: 30 mW Argon-ion laser
Wavelength: 488 nm
Operating system: Microsoft Windows 98
1995 vintage.
KLA / TENCOR / PROMETRIX 6420 Surfscan is a comprehensive wafer testing and metrology equipment designed to provide high-quality data for engineers and technicians who need detailed information about their semiconductor products. This tool is capable of performing surface, defect, overlay, roughness, adhesion or contamination analysis measurements on a variety of wafer types, sizes, and shapes. It is used to inspect the quality of a wafer's surface and defects, and to analyze the performance of microelectronic circuits and interconnects. KLA 6420 Surfscan includes multiple detection systems and an analysis feature set designed to measure micron-level surface characteristics with a 0.1 micron resolution. It has a variable field of view mode, allowing for a full wafer scan in one pass, with adjustable magnification settings of up to 10x for microscopic analysis. It is capable of measuring three different types of defects including particle, pin-hole, and debris, and can obtain both images and data points simultaneously. The automated measurement and detection system can give a 3-dimensional analysis of the wafer's surface and an overall defect map so that the user can identify and address problem areas. TENCOR 6420 Surfscan utilizes advanced algorithms and utilizes an ultra-high speed electrostatic measurement unit, allowing for unparalleled accuracy and repeatability. Additionally, it is set up to detect edge events, minimise false alarms, detect hidden defects, and perform measurements on various process windowing. It also can detect and measure wafer defects outside of the edge area, which would normally be missed by other systems. This instrument's user-friendly interface also allows for quick set-up and detail analysis. Furthermore, it is equipped with an auto-calibration feature, which helps reduce user training, time, and costs. Additionally, it is designed in a cascade machine of fail-proof measures to minimize user interventions and increase data accuracy. Overall, 6420 Surfscan is one of the most accurate and versatile wafer testing and metrology tools available today. It is designed to offer the most reliable and precise defects detection, and its user-friendly design makes it easy to use and maintain. This all-in-one wafer measurement tool is the perfect choice for any semiconductor product testing and analysis needs.
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