Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9216651 for sale
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ID: 9216651
Wafer Size: 6"-8"
Unpatterned surface inspection system, 6"-8"
Bare silicon wafers
With films surface particles & defects
Handler: 6" / 8"
Laser:
ARGON Laser: 30 mW
Wavelength: 488 nm
Blue laser
Operator interface: Trackball and keyboard standard
Operating system: Windows 98.
KLA / TENCOR / PROMETRIX 6420 Surfscan is a state-of-the-art equipment for wafer testing and metrology. The system offers innovative technology, such as Multi-Sensor Technology and Tool Combination for repeatable, reliable wafer measurements. With its advanced capabilities, KLA 6420 Surfscan provides the highest level of accuracy and repeatability in wafer testing and metrology. The unit permits the existing scanning electron microscope (SEM), atomic force microscope (AFM), and scanning thermal microscope (STM) capabilities to be integrated, allowing for a more precise and comprehensive characterization of wafer topography and properties. TENCOR 6420 Surfscan also provides users with a unique scanning method, allowing for high-resolution two-dimensional (2D) and three-dimensional (3D) images to be captured without the need to change the sample. 6420 Surfscan's tool combination feature delivers superior wafer testing and diagnostic capabilities. It combines the best of electron microscopy, optical microscopy, and scanning electron microscopy capabilities for wafer metrology. It also offers a Choice Card machine that allows users to select desired analysis techniques for a particular application. In addition, PROMETRIX 6420 Surfscan offers superior imaging capabilities. Its Multi-Sensor Technology permits the capture of images from several different angles, which improves the image resolution and accuracy. This technology also enables the acquisition of images in low, medium, and high-resolution modes, which gives users the flexibility to select the ideal scanning parameters for each application. Finally, KLA / TENCOR / PROMETRIX 6420 Surfscan also provides superior speed and automation capabilities for wafer measurements. Its high-speed scanning feature allows for wafer topography and defect detection to be acquired quickly and accurately. This feature also minimizes operator time and effort, providing improved throughput for wafer testing and metrology. In conclusion, KLA 6420 Surfscan is a powerful and advanced wafer testing and metrology tool, capable of providing the highest level of precision and accuracy. With its Multi-Sensor Technology, Tool Combination, and Choice Card asset, this model provides users with unparalleled imaging capabilities, speed, and automation.
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