Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9238556 for sale

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KLA / TENCOR / PROMETRIX 6420 Surfscan
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ID: 9238556
Measurement system.
KLA / TENCOR / PROMETRIX 6420 Surfscan is a comprehensive wafer testing and metrology equipment designed to meet the challenging needs of advanced wafer inspection and metrology requirements. This system provides a comprehensive, integrated, and reliable platform for critical process control applications. The Surfscan 6420 employs advanced metrology techniques to acquire comprehensive wafer information, providing full uniformity analysis, overlay, line width, Film Thickness mapping, and contour measurements. It is capable of imaging aggressive angles, from 0 to 85 degrees, to access subtle depth details with relative ease. Additionally, the unit includes a high-end scan head capable of providing two parallel fields of view with an extended depth of focus, and a high-resolution scanner. This multi-channel machine can measure 150 wafer samples in under one hour, with a 0.1 μm resolution. The Surfscan 6420 also includes advanced automation capabilities and true Gaussian filtering for high-precision measurements. It utilizes intelligent edge detection algorithms and a variety of advanced autofocus techniques for accurate measurement results. Other features include an automated light metrology tool for precise surface topography measurements, an automated Photo Dielectric Constant (PDC) measurement module, and automated surface shape analysis. The asset is highly flexible and future-proof, with upgradeable software, hardware, and accessories. Additionally, the model can interface with third-party applications and perform remote operations over an Ethernet network. This helps in remote optimization, support, and maintenance. Overall, KLA 6420 Surfscan is an ideal choice for advanced wafer testing and metrology requirements. It is reliable and precise, and offers comprehensive and automated analysis capabilities. It is compatible with various third-party applications, is future-proof, and network-capable for extended remote operations.
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