Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9287498 for sale

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KLA / TENCOR / PROMETRIX 6420 Surfscan
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ID: 9287498
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KLA / TENCOR / PROMETRIX 6420 Surfscan is a wafer testing and metrology equipment that is designed to provide high speed, non-destructive measurements for high precision wafer inspection and corrective process control. KLA 6420 Surfscan system is the industry leader in providing high precision wafer evaluation at high throughput rates. This unit features a 3 axis vibration isolation table, an automated wafer loader, a 5 micron imaging machine, and a large high resolution camera. The imaging tool is capable of capturing images at 1 micron per pixel which enables it to detect any surface defects at the finest level possible. The 5 micron wide band lasers can evaluate wafers at a range of up to 150 mm. The Surfscan 6420 also has an integrated advanced process control asset which enables it to automatically adjust testing parameters and calibrate measurement results. Additionally, the model has a reliable, automated wafer mapping feature that allows for rapid inspection of entire wafers or larger parts. The equipment is highly user-friendly with advanced software providing data output in a wide range of formats. It offers its users a variety of graphical displays, including measuring points and number of false positives/negatives, all of which can be output in report files. Additionally, the Surfscan 6420 has multiple software packages that offer support for a range of testing applications such as, edge passivation, line width determination, bore or hole shape, and layer testing. The Surfscan 6420 also offers a host of process tools such as template matching, fit match, and scan line fitting. These process tools provide fast control of pattern features or process related protocols. Furthermore, the system integrates seamlessly with existing metrology systems, providing data interoperability and compatibility. TENCOR 6420 Surfscan is one of the most reliable and powerful systems in the wafer testing and metrology industry. It is capable of providing reliable, rapid testing results at a high degree of accuracy. The user-friendly software and robust process control systems offer users the confidence that their testing results are both reliable and repeatable.
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