Used KLA / TENCOR / PROMETRIX 7200 Surfscan #2304 for sale
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ID: 2304
Patterned wafer inspection system
Repeatability: < 3%
Mean count: 500 Particles
Diameter latex spheres: 0.5um
Resolution: 0.4um Diameter latex spheres
Substrate: SEMI Thickness standard wafer 0.3 - 0.75 mm
Substrate size: 100, 125, 150 & 200 mm
Throughput:
(22) Wafers / Hour (150 mm)
(19) Wafers / Hour (200 mm).
KLA / TENCOR / PROMETRIX 7200 Surfscan is a leading edge wafer testing and metrology equipment designed to enable high-throughput, non-destructive testing and metrology of semiconductor wafers. The system integrates advanced test-and-inspection capabilities with field-proven algorithms and variables, providing users with the most accurate wafer testing and metrology results available. The advanced design of KLA 7200 Surfscan enables non-destructive wafer testing and metrology at a fraction of the time and cost where traditional processes are used. The unit is equipped with a state-of-the-art advanced optical microscopy machine which is used to perform macroscopic testing, as well as microscopic analysis for particle measurement, etch depth measurement, topography mapping and line width characterization. TENCOR 7200 Surfscan also comes with a low-force wafer probe that enables users to examine ICs and other components soon after fabrication. PROMETRIX 7200 Surfscan is highly automated and features a host of features to streamline wafer testing and metrology processes. These features include a fully automated wafer handling tool, a high-resolution CCD camera used for automated particle measurements and a high-speed data acquisition asset used for defect analysis and site inspection. The model also offers unique features such as the ability to integrate automated optical inspection with other very high magnifications (VHM) and barrier defect inspection (BDI) capabilities. In terms of performance, 7200 Surfscan leads the pack in wafer test-and-inspection capabilities. Its high-precision algorithms yield reliable test results with improved accuracy, repeatability, and statistical reliability. Its advanced optics equipment produces precise images at high resolutions. And its low-force wafer probe alleviates the risk of damage to sensitive components and maintains the integrity of test samples. In short, KLA / TENCOR / PROMETRIX 7200 Surfscan is a wafer testing and metrology system that enables precise and accurate results at a fraction of the time and cost compared to traditional methods. Its advanced technology and powerful features make it the ideal solution for complete and reliable semiconductor device testing and metrology.
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