Used KLA / TENCOR / PROMETRIX 7600 Surfscan #9073508 for sale

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ID: 9073508
Wafer Size: 8"
Vintage: 1993
Particle inspection system, 8" 1993 vintage.
KLA / TENCOR / PROMETRIX 7600 Surfscan system is a wafer testing and metrology device designed for probing and surface characterization of small electronic structures. It provides in-depth data for monitoring the fabrication process, which is crucial to the efficient and reliable production of modern electronic devices. KLA 7600 Surfscan comprises of three main components; the Analyzer Station, the Optical Metrology Station, and the Wafer Chuck Stage. The Analyzer Station consists of two surfaces measuring heads - the active head, responsible for dual-channel electrical measurements, and the passive head, used to measure film thickness rather than electrical characteristics. The Optical Metrology Station is used to measure surface topography, allowing patterns of high resolution to be evaluated and optimized. The Wafer Chuck Stage is an additional component that ensures precision placement and alignment of the wafer, as well as lid-to-substrate contact. TENCOR 7600 Surfscan also features a number of other components. This includes the High Frequency Sheet Resistance Module, TTV Analysis, and Automation Tools, as well as Optical Particle Inspection and Secondary Ion Mass Spectrometry. High frequency sheet resistance measures the sheet resistance of thin film layers, which can be used to optimize electrical characteristics. The TTV Analysis module, meanwhile, provides detailed views of the surface topography across multiple wafers, developing a faster and more efficient process for wafer-to-wafer comparison. Automation Tools allow the loading of multiple analysis and characterization patterns, while the Optical Particle Inspection provides particle counts of the wafer. Lastly, Secondary Ion Mass Spectrometry separates atoms and molecules by mass for easy and effective contamination analysis. PROMETRIX 7600 Surfscan system offers a comprehensive and high-quality solution to a variety of wafer testing and metrology needs. With the increased accuracy and automation capabilities of the device, it has proven to be an ideal solution for the detection of defects in modern electronics.
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