Used KLA / TENCOR / PROMETRIX 7600 Surfscan #9274943 for sale

ID: 9274943
Wafer Size: 8"
Vintage: 1993
Particle inspection station, 8" Patterned surface inspection system ARGON Laser Power supply: 208 V, 60 Hz 1993 vintage.
KLA / TENCOR / PROMETRIX 7600 Surfscan is a wafer testing and metrology equipment that combines the measurement and inspection of wafer topography and morphology with an automated platform. It utilizes advanced metrology hardware and software innovations to provide process engineers with repeatable and reliable results. Surfscan 7600 is a versatile system used in a variety of industries, including semiconductors, flat panel displays, and photovoltaics. KLA 7600 Surfscan combines a touchless optical unit and non-contact surface measurement technology to provide high resolution, repeatable topographical measurements and images. It utilizes high resolution CCD cameras to capture up to 200 images in both horizontal and vertical directions of a sample's surface profile. Additionally, the machine incorporates an 8-axis automatic sample stage to enable high accuracy scanning of an entire sample. This combination of automatable scanning and non-contact optical profiling allows for fast, highly accurate topological measurements across heterogeneous samples with no mechanical user input. For analysis, the 7600 features multiple analysis packages, including the popular SP3D software for 3D profile analysis, and MV3D for roughness analysis. Utilizing a parallel architecture, SP3D quickly processes data for measurements such as step heights, imaging at single or multiple depths of focus, defects, bumps, feature area, and deviation. The Surfscan 7600 also supports a variety of industry-standard metrology software packages for statistical data collection and analysis. TENCOR 7600 Surfscan is equipped with many practical features that enhance its metrology capability. Features such as one-touch auto-alignment, automated sample scanning, and precise x-y-z profiling, bed area permitting data from multiple sample sizes. Additionally, the 7600 comes with an internal environmental control tool to ensure stability of sample profile measurements across temperatures and relative humidities, allowing the asset to take accurate measurements across diverse geographies and climates. Finally, the 7600 features a software-driven sample processing model, which enables both manual and automatic processing of wafers. Overall, 7600 Surfscan is an advanced wafer testing and metrology equipment uniquely designed to measure and inspect topographical features of heterogeneous samples. It provides process engineers with reliable, repeatable results, featuring a combination of hardware and software innovations that set it apart from its competitors. Its high resolution imaging capability, comprehensive analysis packages, and temperature/humidity stability make it an invaluable tool in a variety of industries.
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