Used KLA / TENCOR / PROMETRIX M-Gage 300 #9105990 for sale

ID: 9105990
Non-contact wafer monitor.
KLA / TENCOR / PROMETRIX M-Gage 300 is a leading-edge wafer testing and metrology equipment. It provides vital measurement and verification services for wafer fabrication, making it an essential part of the semiconductor production process. The system can measure, analyze, display, and control multiple process parameters from the initial wafer to the finished product. KLA M-Gage 300 offers advanced wafer testing and metrology capabilities. It offers Critical Dimension (CD) metrology measurements using its optical scatterfield microscopy (OSM) technology, combined with multi-wavelength ellipsometry (MWE). This provides high-resolution measurements for wafer materials, such as steel, non-ferrous materials, quartz/ceramic, and organic polymers. The unit is also capable of full-field, high-speed imaging for inspecting and measuring wafers. It uses an Advanced Polarization Module (APM) to capture highly-detailed surface images of the wafer's topography, enabling detailed defect characterization. The machine is also equipped with software that can identify and locate the wafer's defects with improved accuracy. TENCOR M-Gage 300 also uses advanced spectral analysis technology, and provides real-time data analysis for product optimization and characterization. The advanced performance of this tool also allows the user to configure the asset for high-throughput, and to accurately measure process-induced mechanical stress or strain on the wafer. PROMETRIX M-Gage 300 offers a comprehensive set of features, including an intuitive user interface, automated wafer loading model, and advanced metrology capabilities. It is designed for use in a wide range of production environments, and is designed to help enable efficient, cost-effective wafer testing and metrology with high precision, accuracy, and repeatability. This high-performance wafer testing and metrology equipment offers essential services for any wafer fabrication facility. Its features provide advanced capabilities that result in improved product optimization and fabrication process control. With M-Gage 300 system, fabricators can expect to increase yields and decrease costs, while meeting critical requirements for on-time deliveries.
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