Used KLA / TENCOR / PROMETRIX M-Gage 300 #9134678 for sale

ID: 9134678
Vintage: 1994
Film thickness measurement system 1994 vintage.
KLA / TENCOR / PROMETRIX M-Gage 300 is a wafer testing and metrology system designed to provide industry-leading accuracy, throughput and flexibility for advanced process control in advanced semiconductor manufacturing. It supports both non-contact, non-destructive inspection and destructive sample testing of a wide range of wafers, from pre-bond to finished products. KLA M-Gage 300 is designed to ensure that the parameters of interest remain in an acceptable range, minimizing the potential for problems that can result from out-of-specification processes such as surface roughness, step height, and resistivity. The system features several key components, including the measurement head, which can be equipped with a variety of sensors to measure different parameters. It also includes a microprocessor-controlled sequential tester, allowing complex multiple-physique test protocols to be performed in a single test cycle. The system is also equipped with an image analysis module and wafer gripper, allowing it to accurately measure the size and shape of a wafer, as well as the contact force between the probe and the wafer surface. TENCOR M-Gage 300 is designed to work with a variety of process chemistries, including spin on, plating, and etching processes. It is capable of achieving high resolution metrology data in just one cycle, without the need for complex mechanical alignment or set-up steps. PROMETRIX M-Gage 300 is designed to detect out of spec defects and provide detailed process analytics, making it an ideal solution for design optimization and process control. M-Gage 300 also excels in non-contact wafer inspection, offering sub-micron resolution and low-noise performance. Its advanced imaging capabilities allow it to detect a variety of different defects, including particles, voids and line-edge roughness. Additionally, it includes a wafer recognition feature, ensuring that the correct wafer is being tested. KLA / TENCOR / PROMETRIX M-Gage 300 offers several features that make it an ideal choice for advanced process control, such as low operating costs and user-friendly operation. Its intuitive software and comprehensive data analysis capabilities make it easy to use and understand, while its flexibility allows it to be adapted to a variety of changing process requirements. All of these features make KLA M-Gage 300 an excellent choice for today's advanced wafer testing and metrology applications.
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