Used KLA / TENCOR / PROMETRIX M-Gage 300 #9412382 for sale

KLA / TENCOR / PROMETRIX M-Gage 300 is an advanced wafer testing and metrology equipment designed for advanced semiconductor process control and analysis. The system provides complete metrology of wafers from bare wafers to complex device structures and is capable of performing advanced measurements such as critical dimension (CD), thin film thickness, electrical performance and more critical data for the semiconductor process yields. The unit includes an integrated three-stage vacuum transfer module for reliable movement of a single wafer between multiple chambers. A high-precision motion machine drives the entire process and provides a wide range of motion ranges such as X, Y, angle, height and wafer size. KLA M-Gage 300 employs high-resolution imaging and automated measurement to deliver accurate testing results with repeatability and consistency. The tool features a high-resolution optical platform with both bright field and dark field optics to capture and analyze critical images. The large field of view imaging asset allows large area measurements which are critical for device process control. TENCOR M-Gage 300 incorporates a range of advanced metrology technologies such as optical scatterometry, scanning electron microscopy, 3D surface profile, ellipsometry and interferometry to measure physical and electrical characteristics of multiple structures. An embedded software processes the collected data to determine the physical and electrical performance characteristics and the results are reported in tabulated formats for further analysis. The model is designed with flexibility for custom experiments like automatic switching of instruments, real-time analysis of previous data and integration of advanced software, image enhancement and other advanced metrology techniques. It provides best-in-class data accuracy and reliability with repeatability to meet the requirements of leading semiconductor manufacturers. The equipment also integrates with M-Gage Suite software for advanced data collection, processing and analytics. The software allows operators to quickly get actionable insights from collected data using its advanced algorithms. The system also employs standard protocols for capture, transmission and archiving of data for further analysis. M-Gage 300 is an advanced wafer testing and metrology unit designed to meet the requirements of leading semiconductor manufacturers and provide them with accurate and reliable measurements of wafer-level process control. With its high resolution imaging, automated measurement, advanced metrology and flexible software, operators are sure to achieve quality experimentations and process control.