Used KLA / TENCOR / PROMETRIX Omnimap RS-35C #9211174 for sale
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ID: 9211174
Wafer Size: 2"-8"
Vintage: 1996
Resistivity mapping system, 2"-8"
Cassette autoloader
Wafer measures: up to 1264 Sites
Resistance: < 5 mohm/sq to > 5 Megohm/sq
Conductive layers:
Implants
Diffusions
EPI
CVD
Metals
Bulk substrates
Maps:
Contour maps
3-D Maps
Diameter scans
Die maps
1996 vintage.
KLA / TENCOR / PROMETRIX Omnimap RS-35C is a high-precision wafer testing and metrology equipment specially designed for production environments. It is capable of accurately measuring wafers of various sizes and shapes to enable efficient non-destructive wafer testing. The system is capable of detecting extremely small feature variations on wafers to ensure high-quality product yields. KLA Omnimap RS-35C unit uses a comprehensive optical metrology technology based on vertical scanning imaging (VSI). It is equipped with a high-resolution CCD camera and advanced algorithms to perform precise scanning and analysis of the wafer surface. This enables the machine to accurately detect defects, such as scratch and pitting, on wafer surfaces. Additionally, the tool also performs advanced thin-film thickness measurements to assess the uniformity of film layers on wafer surfaces. The asset's automated operation and advanced scanning algorithms enable it to quickly process large quantities of wafers with maximum precision. It also features auto-alignment functionality for handling thin and large wafers, as well as automatic focusing and de-foaming to prevent any errors caused by dust contamination. Additionally, the model can also do various non-destructive tests such as electrical testing, line width measurements, thin-film mapping and image analysis. The equipment is housed in a compact, user-friendly cabinet and is equipped with a 25.4cm LCD display for easy monitoring and operation. The system's intuitive graphical user interface (GUI) provides easy setup and selection of the configuration and measurement parameters. Furthermore, it is also available with optional embedded PC functionality and can be integrated with existing automation networks. TENCOR Omnimap RS-35C wafer testing and metrology unit delivers high reliability and precise wafer quality control even in the most challenging production environments. It enables cost effective and fast testing and metrology operations to give users a competitive edge in their operations.
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