Used KLA / TENCOR / PROMETRIX Omnimap RS-35CA #9227292 for sale
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KLA / TENCOR / PROMETRIX Omnimap RS-35CA is a state-of-the-art wafer testing and metrology equipment. It is designed for use on large memory and logic devices, wafer-level and die-level devices. It is an integrated, high precision measurement system that combines several measurements types like optical metrology, electrical testing, brightfield/darkfield imaging, and scanning electron microscopy. The RS-35CA unit offers maximum accuracy at the nanoscale level and high repeatability for a variety of measurements types, including electrical data, optical parameters, 2-D arrays, and correlations. It also offers excellent characterization of defect isolation and sizing for all defects and hillock defects. The machine comprises of a multi-physics platform that combines various scanning technologies such as optical metrology, electrical testing, shadow imaging, and scanning electron microscopy to measure the exact dimensions and materials composition of any given sample. The RS-35CA offers 3-channel optical metrology for its high-precision measurement of the width, depth and height of each sample. This is combined with a command of AC and DC electrical testing techniques which enables the detection and characterization of device defects. The tool also supports brightfield/darkfield imaging for defect isolation and characterization, as well as scanning electron microscope for analysis of the sample structure. The RS-35CA also offers a comprehensive suite of applications that make it suitable for a variety of chip and wafer testing applications. These include: line width, line edge roughness, bow/dish measurements, step height analysis, reflective imaging, spectroscopy analysis, and compositional imaging. Additionally, the asset supports data analysis, defect sensitivity analysis, and process-oriented mapping which enables process engineers to understand the behavior of their process. Overall, KLA Omnimap RS-35CA model is a state-of-the-art wafer testing and metrology equipment that combines several measurement techniques for accurate, repeatable, and reliable results. It is capable of providing reliable information about a variety of device metrics and parameters for both large and small memory and logic devices.
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